So, I think I found the original study: www.nature.com/articles/s41557-023-01346-3, because for some reason these articles never cite the actual studies. What happened to citing sources??
Anyway, apparently they did grew octyltrichlorosilane on silicon wafers. Now, I have no idea what octyltrichlorosilane is, but here is some information I found about it www.chemicalbook.com/…/Octyltrichlorosilane.htm