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naturalgasbad OP , 9 months ago I doubt SMIC can get 3nm yields to an acceptable level using existing DUV machines. Maybe domestic machines will be more capable? The multi-patterning issue surely must be easier to solve than the EUV one.
I doubt SMIC can get 3nm yields to an acceptable level using existing DUV machines. Maybe domestic machines will be more capable? The multi-patterning issue surely must be easier to solve than the EUV one.